Optical and Structural Properties of Thermally Evaporated Zinc Oxide Thin Films on Polyethylene Terephthalate Substrates

被引：38

作者：

Faraj, M. G. ^{[1
]}

Ibrahim, K. ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Phys, Nanooptoelect Res & Technol Lab NOR, George Town 11800, Malaysia

来源：

INTERNATIONAL JOURNAL OF POLYMER SCIENCE | 2011年 / 2011卷

关键词：

OPTOELECTRICAL PROPERTIES; ELECTRICAL-PROPERTIES; THICKNESS DEPENDENCE; DEPOSITION; PET; GLASS; TEMPERATURE;

D O I：

10.1155/2011/302843

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Zinc oxide thin films of different thicknesses ranging from 100 to 300 nm were prepared on polyethylene terephthalate substrates with thermal evaporation in a vacuum of approximately 3 x 10(-5) Torr. X-ray diffraction patterns confirm the proper phase formation of the material. From atomic force microscopy (AFM) images, it was found that the root mean square roughness of the film surface increased as the film thickness increased. The optical properties of ZnO on PET substrates were determined through the optical transmission method using an ultraviolet-visible spectrophotometer. The optical band gap values of ZnO thin films slightly decreased as the film thickness increased.

引用

页数：4

共 21 条

[11] Photoluminescence properties of high-quality ZnO thin films prepared by an RF-magnetron sputtering method [J].

Kim, D ;

Shimomura, T ;

Wakaiki, S ;

Terashita, T ;

Nakayama, M .

PHYSICA B-CONDENSED MATTER, 2006, 376 :741-744

[12] ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor [J].

Lim, S. J. ;

Kwon, Soonju ;

Kim, H. .

THIN SOLID FILMS, 2008, 516 (07) :1523-1528

[13] ZINC-OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION FROM ZINC ACETATE [J].

MARUYAMA, T ;

SHIONOYA, J .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (03) :170-172

[14] Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll-to-roll sputtering process [J].

Park, Yong-Seok ;

Kim, Han-Ki ;

Jeong, Soon-Wook ;

Cho, Woon-Jo .

THIN SOLID FILMS, 2010, 518 (11) :3071-3074

[15] Optical and structural characterisation of zinc oxide thin films prepared by sol-gel process [J].

Srinivasan, G. ;

Kumar, J. .

CRYSTAL RESEARCH AND TECHNOLOGY, 2006, 41 (09) :893-896

[16]

Tauc J., 1974, AMORPHOUS LIQUID SEM

[17]

Tigau N, 2006, J OPTOELECTRON ADV M, V8, P37

[18] Growth and characterisation of electrodepo sited ZnO thin films [J].

Wellings, J. S. ;

Chaure, N. B. ;

Heavens, S. N. ;

Dhannadasa, I. M. .

THIN SOLID FILMS, 2008, 516 (12) :3893-3898

[19] Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering [J].

Yang, Ping-Feng ;

Wen, Hua-Chiang ;

Jian, Sheng-Rui ;

Lai, Yi-Shao ;

Wu, Sean ;

Chen, Rong-Sheng .

MICROELECTRONICS RELIABILITY, 2008, 48 (03) :389-394

[20] Structural and optical properties of ZnO thin films deposited on quartz glass by pulsed laser deposition [J].

Zhao, Lei ;

Lian, Jianshe ;

Liu, Yuhua ;

Jiang, Qing .

APPLIED SURFACE SCIENCE, 2006, 252 (24) :8451-8455

← 1 2 3 →