ZINC-OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION FROM ZINC ACETATE

被引：73

作者：

MARUYAMA, T

SHIONOYA, J

机构：

[1] Department of Chemical Engineering, Faculty of Enginering, Kyoto University, Kyoto

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1992年 / 11卷 / 03期

关键词：

D O I：

10.1007/BF00724682

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

收藏

页码：170 / 172

页数：3

相关论文

共 11 条

[1] Barret C., 1980, STRUCTURE METALS, P204
[2] PROPERTIES OF ZNO FILMS DEPOSITED ONTO INP BY SPRAY PYROLYSIS
EBERSPACHER, C
FAHRENBRUCH, AL
BUBE, RH
[J]. THIN SOLID FILMS, 1986, 136 (01) : 1 - 10
[3] Kamata K., 1981, Yogyo-Kyokai-Shi, V89, P337, DOI 10.2109/jcersj1950.89.1030_337
[4] ON THE USE OF ZINC ACETATE AS A NOVEL PRECURSOR FOR THE DEPOSITION OF ZNO BY LOW-PRESSURE METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION
KHAN, OFZ
OBRIEN, P
[J]. THIN SOLID FILMS, 1989, 173 (01) : 95 - 97
[5] KORZO VF, 1969, INORG MATER+, V5, P304
[6] GROWTH OF EPITAXIAL ZNO THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
LAU, CK
TIKU, SK
LAKIN, KM
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : 1843 - 1847
[7] PHOTO-ASSISTED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZINC-OXIDE THIN-FILMS
MARUYAMA, T
NAKAI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (03): : L346 - L348
[8] SEMICONDUCTING ZINC-OXIDE FILMS PREPARED BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION FROM DIETHYL ZINC
ROTH, AP
WILLIAMS, DF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) : 2684 - 2686
[9] RYABOVA LA, 1968, IAN SSSR NEORG MATER, V4, P602
[10] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ORIENTED ZNO FILMS OVER LARGE AREAS
SMITH, FTJ
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (12) : 1108 - 1110