The unique capability of X-ray photon spectroscopy and X-ray excited Auger electron spectroscopy in identifying the sp2/sp3 ratio on the surface of growing carbon films

The CKVV Auger spectra of polymers: polyethylene (sp(3)), p-quaterphenyl (sp(2)) and polystyrene (sp(2)/sp(3)=3/1) have been studied. The possibility for a synthesis of Auger spectrum for polystyrene by that for p-quaterphenyl (three parts) and polyethylene (one part) is shown. A combination of X-ray photon spectroscopy (XPS) and X-ray excited Auger electron spectroscopy (XAES) data were used for study a chemical states of carbon atoms on glassy carbon surface before (GC1) and after (GC2) scratching. A magnetron sputtering of graphite in the gas mixtures Ar + C6H12, Ar + CF4 and Ar + O-2 have been investigated ex situ by XPS and XAES. The formation and relative concentrations of C-O, C=O; and C-F, C-F-2 bonds for sputtering in Ar + O-2, and Ar + CF4, mixtures, respectively, has been determined by XPS. The transition of carbon atoms from the sp(2)-bonding to the sp(3)-hybridized state has been observed by XPS and XAES. (C) 1998 Elsevier Science S.A. All rights reserved.