Heteroepitaxy of LaAlO3 (100) on SrTiO3 (100):: In situ growth of LaAlO3 thin films by metal-organic chemical vapor deposition from a liquid single source

被引：35

作者：

Malandrino, G

Fragalà, IL

Scardi, P

机构：

[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, CT, Italy

[2] Univ Trent, Dipartimento Ingn Mat, I-38050 Trent, TN, Italy

来源：

CHEMISTRY OF MATERIALS | 1998年 / 10卷 / 12期

关键词：

D O I：

10.1021/cm9804970

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

High-quality epitaxial. LaAlO3 thin films have been obtained on SrTiO3 (100) substrates by metal-organic chemical vapor deposition(MOCVD) adopting an in-situ strategy which uses a Liquid single source consisting of the second-generation La(hfa)(3).diglyme (Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme = bis(2-methoxyethyl)ether) precursor and Al(acac)(3) (Hacac = acetylacetone). The LaAlO3 films, 400 nm thick, are strongly c-axis oriented with a similar to 0.4 degrees fwhm of the rocking curve [(200) reflection]. Pole figures provide indication of good in-plane texture.

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页码：3765 / +

页数：5

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