Realization and thermal characterization of thin-film optothermal microsensor

被引:5
作者
Gualous, H
Louahlia-Gualous, H
Bocus, S
机构
[1] LEES, IGE, F-90000 Belfort, France
[2] CREST, IGE, F-90000 Belfort, France
关键词
D O I
10.1051/epjap:2001151
中图分类号
O59 [应用物理学];
学科分类号
摘要
The aim of this investigation is to study thin-film thermoelectric linear arrays for high spatial temperature measurements and to analyze power laser energy profile. The sensitive area consists of a planar of 16 individual thin-film Au-Pd thermocouple junctions with 8 mum x 8 mum of surface area. This sensor allows 16 temperature measurements per 288 mum. It is processed by means of standard integrated circuit techniques. Thermal simulation of heat conduction in gold and palladium layers has been carried out. The sensor thermoelectric response has been characterized in transient regime and steady state. The time constant of thermocouple response is of the order of 140 mus. A linear relationship between the thermoelectric voltage and the incident power laser has been put in evidence. Using the linear array, a Gaussian profile of the incident laser beam is obtained.
引用
收藏
页码:147 / 152
页数:6
相关论文
共 16 条
[1]   Metallic thin-film thermocouple for thermoelectric microgenerators [J].
Castano, E ;
Revuelto, E ;
Martin, MC ;
GarciaAlonso, A ;
Gracia, FJ .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :65-67
[2]   Performance of GaAs microbridge thermocouple infrared detectors [J].
Chong, N ;
Srinivas, TAS ;
Ahmed, H .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (02) :136-141
[3]   Fabrication of planar thermocouples for real-time measurements of temperature profiles in polymer melts [J].
Debey, D ;
Bluhm, R ;
Habets, N ;
Kurz, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (03) :179-184
[4]  
DEDE A, 1995, SENSOR ACTUAT A-PHYS, V46, P432
[5]   IMMERSION CHARACTERISTICS AND REPRODUCIBILITY OF THE GOLD/PALLADIUM THERMOCOUPLE [J].
KIM, YG ;
GAM, KS ;
KANG, KH .
METROLOGIA, 1994, 31 (02) :145-147
[6]   Behaviour of Au/Pd thermocouple in various gases [J].
Kim, YG .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1998, 9 (08) :1211-1214
[7]   LASER BEAMS AND RESONATORS [J].
KOGELNIK, H ;
LI, T .
APPLIED OPTICS, 1966, 5 (10) :1550-+
[8]  
KREIDER KG, 1994, MATER RES SOC SYMP P, V322, P285
[9]   Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers [J].
Kreider, KG ;
DiMeo, F .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (01) :46-52
[10]   THERMOELECTRIC INFRARED-SENSORS IN CMOS TECHNOLOGY [J].
LENGGENHAGER, R ;
BALTES, H ;
ELBEL, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :216-220