Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

Uniaxial tensile testing of single-crystal silicon film was carried out on a silicon chip. A tensile testing system was integrated on a silicon chip. A process for fabricating a test chip containing a specimen whose tensile axis has an arbitrary orientation was developed. The mechanical properties, such as elastic modulus and fracture strain, of silicon films having different orientations of [100], (110), and [111], are measured. The results are compared with those of bulk materials. (C) 1998 Elsevier Science S.A. All rights reserved.