Polysilicon optical microscanners for laser scanning displays

被引：26

作者：

Kiang, MH ^{[1
]}

Solgaard, O

Lau, KY

Muller, RS

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA 95616 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 70卷 / 1-2期

关键词：

optical scanning; display; polysilicon microscanner; electrostatic-comb actuator;

D O I：

10.1016/S0924-4247(98)00133-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have designed and fabricated polysilicon microscanners using surface micromachining technologies. The scanners have electrostatic-comb actuators to drive 300 x 400 mu m(2) micromirrors mounted on stationary frames by torsion bars. Torsion-bar mounting improves scanning precision from what is achievable using hinge mounting with journal bearings. The scans are accurate to 0.19 mad; that is a scan jitter of 0.1% of the full scale, or 9% of a pixel. A 7 x 10-pixel laser-scanning display built with a seven-element, fan-diode-laser array and a scanning polysilicon micromirror is presented. A dual-axis, raster-scanning system based on similar resonant microscanners can be integrated on a chip with the Light sources to produce compact microdisplay modules. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：195 / 199

页数：5

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