Laser-to-fiber coupling module using a micromachined alignment mirror

被引：24

作者：

Daneman, MJ ^{[1
]}

Solgaard, O ^{[1
]}

Tien, NC ^{[1
]}

Lau, KY ^{[1
]}

Muller, RS ^{[1
]}

机构：

[1] UNIV CALIF DAVIS,DEPT ELECT & COMP ENGN,DAVIS,CA 95616

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 03期

关键词：

D O I：

10.1109/68.481129

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the fabrication of a laser-to-fiber coupling module that incorporates a movable silicon-micromachined alignment micromirror. The micromirror can position a beam on a fiber within a 0.17 mu m standard deviation and has a range of motion of more than 200 mu m. Measurements on the module have shown a reproducible coupling efficiency of 40%. The coupling module provides a means to compensate for placement inaccuracies of passively assembled optical components.

引用

页码：396 / 398

页数：3

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