Low-temperature growth and direct transfer of graphene-graphitic carbon films on flexible plastic substrates

被引:22
作者
Kim, Yong-Jin [1 ]
Kim, Sang Jin [2 ,3 ]
Jung, Myung Hee [4 ]
Choi, Kwang Yeol [4 ]
Bae, Sukang [1 ,2 ,3 ]
Lee, Seoung-Ki [2 ,3 ,5 ]
Lee, Youngbin [2 ,3 ,5 ]
Shin, Dolly [1 ]
Lee, Bora [6 ]
Shin, Huiyoun [4 ]
Choi, Myungshin [4 ]
Park, Kyuho [4 ]
Ahn, Jong-Hyun [2 ,3 ,5 ]
Hong, Byung Hee [1 ,2 ,3 ]
机构
[1] Seoul Natl Univ, Coll Nat Sci, Dept Chem, Seoul 151747, South Korea
[2] Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, South Korea
[3] Sungkyunkwan Univ, Ctr Human Interface Nano Technol HINT, Suwon 440746, South Korea
[4] LG Elect Adv Res Inst, Mat & Components Lab, Seoul 137724, South Korea
[5] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 440746, South Korea
[6] Sungkyunkwan Univ, Dept Chem, Suwon 440746, South Korea
关键词
CHEMICAL-VAPOR-DEPOSITION; LIGHT-EMITTING-DIODES; LARGE-AREA; HIGH-QUALITY; TRANSPARENT;
D O I
10.1088/0957-4484/23/34/344016
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We demonstrate low-temperature growth and direct transfer of graphene-graphitic carbon films (G-GC) onto plastic substrates without the use of supporting materials. In this approach, G-GC films were synthesized on copper layers by using inductively coupled plasma enhanced chemical vapor deposition, enabling the growth of few-layer graphene (G) on top of Cu and the additional growth of graphitic carbon (GC) films above the graphene layer at temperatures as low as 300 degrees C. The patterned G-GC films are not easily damaged or detached from the polymer substrates during the wet etching and transfer process because of the van der Waals forces and pi-pi interactions between the films and the substrates. Raman spectroscopy reveals the two-dimensional hexagonal lattice of carbon atoms and the crystallinity of the G-GC films. The optical transparency and sheet resistance of the G-GC films are controlled by modulating the film thickness. Strain sensors are successfully fabricated on plastic substrates, and their resistance modulation at different strains is investigated.
引用
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页数:6
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