Achromatic phase-shifting for two-wavelength phase-stepping interferometry

被引：20

作者：

Hariharan, P

Roy, M

机构：

来源：

OPTICS COMMUNICATIONS | 1996年 / 126卷 / 4-6期

关键词：

D O I：

10.1016/0030-4018(96)00118-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Achromatic phase-shifting can be used with two-wavelength illumination in a polarization interferometer to provide a quick and simple method for profiling surfaces exhibiting steps with heights of a few micrometres.

引用

页码：220 / 222

页数：3

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