Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy

被引：80

作者：

Jansson, PAC ^{[1
]}

Vogt, U ^{[1
]}

Hertz, HM ^{[1
]}

机构：

[1] Royal Inst Technol Albanova, SE-10691 Stockholm, Sweden

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2005年 / 76卷 / 04期

关键词：

D O I：

10.1063/1.1884186

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe a liquid-nitrogen-jet laser-plasma source with sufficient brightness, uniformity, stability, and reliability to be suitable for compact water-window soft x-ray transmission microscopy. A cooled capillary nozzle arrangement allows long-term operation and avoids previously reported jet instabilities. The source is quantitatively characterized by calibrated slit-grating spectroscopy and zone-plate imaging. The absolute photon number in the major spectral lines (lambda=2.48 nm and lambda=2.88 nm) is 1.0x10(12) photons/(pulsexsrxline). The source diameter is similar to 20 mu m (full width at half maximum) and the spatial stability is better than +/- 2 mu m. Within an area with uniformity of 20%, the average source brightness is 4x10(8) photons/(pulsexsrx mu m(2)xline), which allows operation of a compact soft x-ray transmission microscope with exposure times of a few minutes. (C) American Institute of Physics.

引用

页数：5

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