45-GHz bandwidth-efficiency resonant-cavity-enhanced ITO-Schottky photodiodes

被引:22
作者
Biyikli, N [1 ]
Kimukin, I
Aytür, O
Gökkavas, M
Ünlü, MS
Ozbay, E
机构
[1] Bilkent Univ, Dept Elect Engn, TR-06533 Bilkent, Turkey
[2] Bilkent Univ, Dept Phys, TR-06533 Bilkent, Turkey
[3] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
基金
美国国家科学基金会;
关键词
bandwidth-efficiency; high-speed; indium-tin-oxide; photodides; photodetectors; resonant-cavity enhancement; Schottky photodiode;
D O I
10.1109/68.930421
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-speed Schottky photodiodes suffer from low efficiency mainly due to the thin absorption layers and the semitransparent Schottky-contact metals. We have designed, fabricated and characterized high-speed and high-efficiency AlGaAs-GaAs-based Schottky photodiodes using transparent indium-tin-oxide Schottky contact material and resonant cavity enhanced detector structure. The measured devices displayed resonance peaks around 820 nm with 75% maximum peak efficiency and an experimental setup limited temporal response of 11 ps pulsewidth. The resulting 45-GHz bandwidth-efficiency product obtained from these devices corresponds to the best performance reported to date for vertically illuminated Schottky photodiodes,
引用
收藏
页码:705 / 707
页数:3
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