Synthesis of few-layered graphene by ion implantation of carbon in nickel thin films

被引:81
作者
Baraton, Laurent [1 ]
He, Zhanbing [1 ]
Lee, Chang Seok [1 ]
Maurice, Jean-Luc [1 ]
Cojocaru, Costel Sorin [1 ]
Gourgues-Lorenzon, Anne-Francoise [2 ]
Lee, Young Hee [3 ]
Pribat, Didier [3 ]
机构
[1] Ecole Polytech, CNRS, UMR 7647, Lab Phys Interfaces & Couches Minces, F-91128 Palaiseau, France
[2] Mines ParisTech, CNRS, UMR 7633, Ctr Mat, F-91000 Evry, France
[3] Sungkyunkwan Univ, Dept Energy Sci, Div Phys, Suwon 440746, South Korea
关键词
CHEMICAL-VAPOR-DEPOSITION; LARGE-AREA; EPITAXIAL GRAPHENE; DEVICES;
D O I
10.1088/0957-4484/22/8/085601
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The synthesis of few-layered graphene is performed by ion implantation of carbon species in thin nickel films, followed by high temperature annealing and quenching. Although ion implantation enables a precise control of the carbon content and of the uniformity of the in-plane carbon concentration in the Ni films before annealing, we observe thickness non-uniformities in the synthesized graphene layers after high temperature annealing. These non-uniformities are probably induced by the heterogeneous distribution/topography of the graphene nucleation sites on the Ni surface. Taken altogether, our results indicate that the number of graphene layers on top of Ni films is controlled by the nucleation process on the Ni surface rather than by the carbon content in the Ni film.
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页数:5
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