Charge-imaging field-effect transistor

被引:11
作者
Chen, LH
Topinka, MA
LeRoy, BJ
Westervelt, RM [1 ]
Maranowski, KD
Gossard, AC
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
[3] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
关键词
D O I
10.1063/1.1395516
中图分类号
O59 [应用物理学];
学科分类号
摘要
Charge-imaging field-effect transistors (FETs) were fabricated from a GaAs/AlGaAs heterostructure containing a near-surface two-dimensional electron gas. These FETs have quantum point contact geometries to minimize the size of the channel and to improve the spatial resolution. The charge noise at T=4.2 K has a 1/f behavior and reaches values <<1e/Hz(1/2) at 30 kHz. The spatial resolution of the FET was measured at liquid He temperatures using a scanned probe microscope with a charged tip. The charge sensitivity of the FET is confined to a disk with full width at half maximum 340 nm. These FETs are suitable for integration onto a GaAs/AlGaAs scanned probe microscopy cantilever. (C) 2001 American Institute of Physics.
引用
收藏
页码:1202 / 1204
页数:3
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