Mass and position determination of attached particles on cantilever based mass sensors

被引：175

作者：

Dohn, S.

Svendsen, W.

Boisen, A.

Hansen, O.

机构：

[1] Tech Univ Denmark, MIC, Dept Micro & Nanotechnol, NanoDTU, DK-2800 Lyngby, Denmark

[2] Tech Univ Denmark, Danish Natl Res Fdn, CINF, Dept Micro & Nanotechnol,NanoDTU, DK-2800 Lyngby, Denmark

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2007年 / 78卷 / 10期

关键词：

D O I：

10.1063/1.2804074

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An analytical expression relating mass and position of a particle attached on a cantilever to the resulting change in cantilever resonant frequency is derived. Theoretically, the position and mass of the attached particle can be deduced by combining measured resonant frequencies of several bending modes. This finding is verified experimentally using a microscale cantilever with and without an attached gold bead. The resonant frequencies of several bending modes are measured as a function of the bead position. The bead mass and position calculated from the measured resonant frequencies are in good agreement with the expected mass and the position measured. (C) 2007 American Institute of Physics.

引用

页数：3

共 14 条

[11]

SENTURIA SD, 2002, MICOSYSTEM DESIGN, P239

[12] A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever.: Part II:: Sensor calibration and glycerine evaporation rate measurement [J].