共 22 条
[7]
PARTICULATE TEMPERATURE IN RADIO-FREQUENCY GLOW-DISCHARGES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1993, 11 (04)
:1126-1131
[8]
Donovan R.P., 1990, PARTICLE CONTROL SEM
[10]
TEMPERATURE DEPENDENCE OF RAMAN SCATTERING IN SILICON
[J].
PHYSICAL REVIEW B-SOLID STATE,
1970, 1 (02)
:638-&