Strain field imaging on Si/SiGe(001)-(2x1) surfaces by low-energy electron microscopy and scanning tunneling microscopy

被引：9

作者：

Jones, DE

Pelz, JP

Hong, Y

Tsong, IST

Xie, YH

Silverman, PJ

机构：

[1] ARIZONA STATE UNIV,DEPT PHYS & ASTRON,TEMPE,AZ 85287

[2] AT&T BELL LABS,LUCENT TECHNOL,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 21期

关键词：

D O I：

10.1063/1.118024

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We show that ultrahigh-vacuum low-energy electron microscopy and scanning tunneling microscopy can be used to image residual uniaxial strain fields on (001) surfaces of Sice heterostructures. We find that the surface crosshatch morphology on these films is highly correlated with large spatial variations in the residual uniaxial strain fields, confirming the importance of local strain fields in the formation of crosshatch. (C) 1996 American Institute of Physics.

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页码：3245 / 3247

页数：3

相关论文

共 18 条

[1] LOW-ENERGY-ELECTRON MICROSCOPY [J].

BAUER, E .

REPORTS ON PROGRESS IN PHYSICS, 1994, 57 (09) :895-938

[2] STABILITIES OF SINGLE-LAYER AND BILAYER STEPS ON SI(001) SURFACES [J].

CHADI, DJ .

PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1691-1694

[3] RELAXED GEXSI1-X STRUCTURES FOR III-V INTEGRATION WITH SI AND HIGH MOBILITY 2-DIMENSIONAL ELECTRON GASES IN SI [J].

FITZGERALD, EA ;

XIE, YH ;

MONROE, D ;

SILVERMAN, PJ ;

KUO, JM ;

KORTAN, AR ;

THIEL, FA ;

WEIR, BE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1807-1819

[4] TUNNELING MICROSCOPY OF STEPS ON VICINAL GE(001) AND SI(001) SURFACES [J].

GRIFFITH, JE ;

KUBBY, JA ;

WIERENGA, PE ;

BECKER, RS ;

VICKERS, JS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :493-496

[5] SURFACE-MORPHOLOGY OF RELATED GEXSI1-X FILMS [J].

HSU, JWP ;

FITZGERALD, EA ;

XIE, YH ;

SILVERMAN, PJ ;

CARDILLO, MJ .

APPLIED PHYSICS LETTERS, 1992, 61 (11) :1293-1295

[6] Striped phase and temperature dependent step shape transition on highly B-doped Si(001)-(2x1) surfaces [J].

Jones, DE ;

Pelz, JP ;

Hong, Y ;

Bauer, E ;

Tsong, IST .

PHYSICAL REVIEW LETTERS, 1996, 77 (02) :330-333

[7]

JONES DE, 1995, SURF SCI, V341, pL1005

[8] ENHANCED STEP WAVINESS ON SIGE(001)-(2X1) SURFACES UNDER TENSILE STRAIN [J].

JONES, DE ;

PELZ, JP ;

XIE, YH ;

SILVERMAN, PJ ;

GILMER, GH .

PHYSICAL REVIEW LETTERS, 1995, 75 (08) :1570-1573

[9] INFLUENCE OF MISFIT DISLOCATIONS ON THE SURFACE-MORPHOLOGY OF SI1-XGEX FILMS [J].

LUTZ, MA ;

FEENSTRA, RM ;

LEGOUES, FK ;

MOONEY, PM ;

CHU, JO .

APPLIED PHYSICS LETTERS, 1995, 66 (06) :724-726

[10] SI(100) SURFACE UNDER AN EXTERNALLY APPLIED STRESS [J].

MEN, FK ;

PACKARD, WE ;

WEBB, MB .

PHYSICAL REVIEW LETTERS, 1988, 61 (21) :2469-2471