Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy

被引：22

作者：

Schürmann, G

Noell, W

Staufer, U

de Rooij, NF

Eckert, R

Freyland, JM

Heinzelmann, H

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

[2] Swiss Ctr Elect & Microtechnol Inc, CH-2007 Neuchatel, Switzerland

来源：

APPLIED OPTICS | 2001年 / 40卷 / 28期

关键词：

D O I：

10.1364/AO.40.005040

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A cantilever-based probe is introduced for use in scanning near-field optical microscopy (SNOM) combined with scanning atomic-force microscopy (AFM). The probes consist of silicon cantilevers with integrated 25-mum-high fused-silica tips. The probes are batch fabricated by microfabrication technology. Transmission electron microscopy reveals that the transparent quartz tips are completely covered with an opaque aluminum layer before the SNOM measurement. Static and dynamic AFM imaging was performed. SNOM imaging in transmission mode of single fluorescent molecules shows an optical resolution better than 32 nm. (C) 2001 Optical Society of America.

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页码：5040 / 5045

页数：6

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