Influence of the hydrogen evolution on the structural and electronic properties of a-C:H films

被引：16

作者：

Bounouh, Y

Spousta, J

Clin, M

Benlahsen, M

Zeinert, A

Portemer, F

Laurent, A

Perriere, J

Zellama, K

Theye, ML

机构：

[1] FAC SCI AMIENS,LAB PHYS COUCHES MINCES,F-80039 AMIENS,FRANCE

[2] FAC SCI AMIENS,URA CNRS 1211,LAB REACTIVITE & CHIM SOLIDES,F-80039 AMIENS,FRANCE

[3] UNIV PARIS 07,PHYS SOLIDES GRP,URA CNRS 17,F-75251 PARIS 05,FRANCE

来源：

关键词：

amorphous carbon; hydrogen; microstructure; annealing;

D O I：

10.1016/0925-9635(95)00502-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The nature of hydrogen bonding and its influence on the electronic properties and the atomic structure was investigated in two types of a-C:H films prepared in a d.c. multipolar plasma system from pure methane at different substrate bias, by performing H evolution and annealing experiments. The results indicate clearly that these two types of samples have different morphologies in their as-deposited state, and that they behave differently upon annealing up to high temperature.

引用

页码：453 / 456

页数：4

共 12 条

[1]

Bellamy L.J., 1975, INFRARED SPECTRA COM, V2

[2] INFLUENCE OF ANNEALING ON THE HYDROGEN-BONDING AND THE MICROSTRUCTURE OF DIAMOND-LIKE AND POLYMER-LIKE HYDROGENATED AMORPHOUS-CARBON FILMS [J].