Femtosecond laser-based technology for fast development of micromechanical devices

被引：17

作者：

Bähnisch, R ^{[1
]}

Gross, W ^{[1
]}

Staud, J ^{[1
]}

Menschig, A ^{[1
]}

机构：

[1] Deutsch Zentrum Luft & Raumfahrt, Inst Tech Phys, D-70569 Stuttgart, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 74卷 / 1-3期

关键词：

process technology; micromachining; femtosecond laser; design concept; micromechanical devices; micro manipulators;

D O I：

10.1016/S0924-4247(98)00333-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present maskless, laser-based high precision micromachining processes for flexible device development and fabrication. Cutting of complex geometries into thin plates, selective removal of thin films or local deposition of thin films can be done with minor changes in the system set-up. All the techniques are based on the use of a femtosecond Ti:Sapphire laser system with a pulse length shorter than 10 ps. A new design concept for microdevices which uses this laser-based fast development technique will be discussed. Various manipulators for microparts consisting of several functional elements which are Filed up will be demonstrated. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：31 / 34

页数：4

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