共 23 条
[1]
[Anonymous], 1990, PRACTICAL SURFACE AN, V1
[5]
Burger RW, 1991, P 34 ANN TECH C SOC, P162
[6]
Egitto F.D., 1993, P 36 ANN SVC C DALL, P10
[8]
A QUASI-DIRECT-CURRENT SPUTTERING TECHNIQUE FOR THE DEPOSITION OF DIELECTRICS AT ENHANCED RATES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1988, 6 (03)
:1845-1848
[9]
Finson E., 1995, P 38 ANN TECHN C, P52