7.5kW/mm2 current switch using AlGaN/GaN metal-oxide-semiconductor heterostructure field effect transistors on SiC substrates

被引:92
作者
Simin, G
Hu, X
Ilinskaya, N
Kumar, A
Koudymov, A
Zhang, J
Khan, MA
Gaska, R
Shur, MS
机构
[1] Univ S Carolina, Dept Elect & Comp Engn, Columbia, SC 29208 USA
[2] Sensor Elect Technol Inc, Latham, NY USA
[3] Rensselaer Polytech Inst, Troy, NY USA
关键词
D O I
10.1049/el:20001401
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A fast high-power solid-state switch based on a novel large periphery multigate AlGaN/GaN metal-oxide-semiconductor heterostructure field effect transistor (MOSHFET) over 4H-SiC substrates is demonstrated. For a device with 1mm periphery and 10 mum gate-drain spacing, 7.5kW/mm(2) of switched power with on-state resistance of 75mW x mm(2) is obtained. The pulse response of the MOSHFET switch exhibited a rise-time < 5ns in pulsemode operation.
引用
收藏
页码:2043 / 2044
页数:2
相关论文
共 11 条
[1]   High voltage GaN Schottky rectifiers [J].
Dang, GT ;
Zhang, AP ;
Ren, F ;
Cao, XA ;
Pearton, SJ ;
Cho, H ;
Han, J ;
Chyi, JI ;
Lee, CM ;
Chuo, CC ;
Chu, SNG ;
Wilson, RG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (04) :692-696
[2]  
GASKA R, IN PRESS GAN BASED H
[3]   AlGaN/GaN metal oxide semiconductor heterostructure field effect transistor [J].
Khan, MA ;
Hu, X ;
Sumin, G ;
Lunev, A ;
Yang, J ;
Gaska, R ;
Shur, MS .
IEEE ELECTRON DEVICE LETTERS, 2000, 21 (02) :63-65
[4]   AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors on SiC substrates [J].
Khan, MA ;
Hu, X ;
Tarakji, A ;
Simin, G ;
Yang, J ;
Gaska, R ;
Shur, MS .
APPLIED PHYSICS LETTERS, 2000, 77 (09) :1339-1341
[5]   High performance microwave power GaN/AlGaN MODFETs grown by RF-assisted MBE [J].
Nguyen, NX ;
Micovic, M ;
Wong, WS ;
Hashimoto, P ;
McCray, LM ;
Janke, P ;
Nguyen, C .
ELECTRONICS LETTERS, 2000, 36 (05) :468-469
[6]  
Palmour JW, 1996, INST PHYS CONF SER, V142, P813
[7]  
SHEPPARD ST, 2000, DEV RES C CO JUN 19, P37
[8]  
SIMIN G, UNPUB IEEE ELECT DEV
[9]   Silicon carbide high-power devices [J].
Weitzel, CE ;
Palmour, JW ;
Carter, CH ;
Moore, K ;
Nordquist, KJ ;
Allen, S ;
Thero, C ;
Bhatnagar, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1996, 43 (10) :1732-1741
[10]   Short-channel Al0.5Ga0.5N/GaN MODFETs with power density &gt;3W/mm at 18GHz [J].
Wu, YF ;
Keller, BP ;
Fini, P ;
Pusl, J ;
Le, M ;
Nguyen, NX ;
Nguyen, C ;
Widman, D ;
Keller, S ;
Denbaars, SP ;
Mishra, UK .
ELECTRONICS LETTERS, 1997, 33 (20) :1742-1743