Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

被引：208

作者：

Hsueh, Ting-Jen

Chang, Shoou-Jinn

Hsu, Cheng-Liang

Lin, Yan-Ru ^{[1
]}

Chen, I.-Cherng

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan

[2] Micro Syst Technol Ctr, Ind Technol Res Inst S, Tainan 709, Taiwan

[3] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[4] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 05期

关键词：

GAS-SENSOR; GROWTH; NANORODS; ARRAYS;

D O I：

10.1063/1.2757605

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 degrees C and increased from 36.0% to 61.5% at 230 degrees C. (c) 2007 American Institute of Physics.

引用

收藏

页数：3

相关论文

共 20 条

[1] Gate-refreshable nanowire chemical sensors [J].

Fan, ZY ;

Lu, JG .

APPLIED PHYSICS LETTERS, 2005, 86 (12) :1-3

[2] Synthesis and properties of multipod-shaped ZnO nanorods for gas-sensor applications [J].

Gao, T ;

Wang, TH .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (07) :1451-1454

[3] Hydrogen sensitivity of ZnO p-n homojunctions [J].

Hazra, S. K. ;

Basu, S. .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 117 (01) :177-182

[4] Site-specific growth of Zno nanorods using catalysis-driven molecular-beam epitaxy [J].

Heo, YW ;

Varadarajan, V ;

Kaufman, M ;

Kim, K ;

Norton, DP ;

Ren, F ;

Fleming, PH .

APPLIED PHYSICS LETTERS, 2002, 81 (16) :3046-3048

[5] Vertical single-crystal ZnO nanowires grown on ZnO:Ga/glass templates [J].

Hsu, CL ;

Chang, SJ ;

Hung, HC ;

Lin, YR ;

Huang, CJ ;

Tseng, YK ;

Chen, IC .

IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2005, 4 (06) :649-654

[6] Crabwise ZnO nanowires: Growth and field emission properties [J].

Hsueh, Ting-Jen ;

Hsu, Cheng-Liang ;

Chang, Shoou-Jinn ;

Lu, Chien-Yuan ;

Lin, Yan-Ru ;

Chen, I. -Cherng .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2007, 7 (03) :1076-1079

[7] Growth and characterization of sparsely dispersed ZnO nanowires [J].

Hsueh, Ting-Jen ;

Hsu, Cheng-Liang ;

Chang, Shoou-Jinn ;

Lin, Yan-Ru ;

Lin, Tzer-Shen ;

Chen, I-Cherng .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (03) :H153-H156

[8] A novel method for the formation of ladder-like ZnO nanowires [J].

Hsueh, Ting-Jen ;

Chang, Shoou-Jinn ;

Lin, Yan-Ru ;

Tsai, Song-Yeu ;

Chen, I-Cherng ;

Hsu, Cheng-Liang .

CRYSTAL GROWTH & DESIGN, 2006, 6 (06) :1282-1284

[9]

HSUEH TJ, IN PRESS SENS ACTU B

[10] ZnO nanoparticle-modified infrared internal reflection elements for selective detection of volatile organic compounds [J].

Huang, GG ;

Wang, CT ;

Tang, HT ;

Huang, YS ;

Yang, J .

ANALYTICAL CHEMISTRY, 2006, 78 (07) :2397-2404