Microstructure and gas-sensing properties of(Sn,Ti)O2 thin films deposited by RGTO technique

被引：47

作者：

Radecka, M

Przewoznik, J

Zakrzewska, K

机构：

[1] Stanislaw Staszic Univ Min & Met, Fac Mat Sci & Ceram, PL-30059 Krakow, Poland

[2] Stanislaw Staszic Univ Min & Met, Dept Solid State Phys, PL-30059 Krakow, Poland

[3] Stanislaw Staszic Univ Min & Met, Fac Electrotechn Automat Comp Sci & Elect, PL-30059 Krakow, Poland

来源：

THIN SOLID FILMS | 2001年 / 391卷 / 02期

关键词：

SnO2; rheotaxial growth and thermal oxidation; gas sensor; microstructure;

D O I：

10.1016/S0040-6090(01)00990-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The application of the RGTO (rheotaxial growth and thermal oxidation) technique to the deposition of(Sn,Ti)O-2 thin films is described. Phase composition, microstructure, surface roughness and gas-sensing properties of thin films were studied. The comparison between the films grown by RGTO and those obtained in the reactive rf sputtering is given. The structure modelling has been performed to account for the presence of two crystallographic phases: tetragonal; and orthorhombic in the RGTO-thin films. It is shown that RGTO yields oxides of extremely rough surfaces. Illumination of such a layer with an electromagnetic wave of the wavelength comparable with dimensions of surface irregularities results in an enhanced light scattering. The electrical responses to 200-10000 ppm H-2 and 150-1000 ppm CH4 are reproducible and significant at the sensor operating temperature of 400 degreesC. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：247 / 254

页数：8

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[11] SUBSOLIDUS EQUILIBRIA IN TIO2-SNO2 SYSTEM [J].