Surface micromachined integrated optic polarization beam splitter

An integrated polarization beam splitting system composed of one binary phase Fresnel collimating lens and one polarization beam splitter (PBS) has been realized on a single Si chip using a commercially available foundry polysilicon surface micromachining process [Multi-User Mems ProcesS, or (MUMPS)] at Mems Center at North Carolina (MCNC). The polarization extinction ratios of 10 dB for the transmitted light and over 20 dB for the reflected light have been achieved. The whole system is prealigned through computer-aided design on a Si substrate and is lifted up perpendicular to the substrate after structure release. This system opens opportunities for various applications where the light polarization states could be utilized.