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Emergence of Ag particles and their effects on the mechanical properties of TaN-Ag nanocomposite thin films

被引：21
作者：
Tseng, C. C.
Hsieh, J. H. [1 ]
Wu, W.
Chang, S. Y.
Chang, C. L.
机构：
[1] Natl Chung Hsing Univ, Dept Mat Engn, Taichung 402, Taiwan
[2] Mingchi Univ Technol, Dept Mat Engn, Taipei 24301, Taiwan
[3] Mingdao Univ, Dept Mat Sci & Engn, Changhua 52345, Taiwan
来源：
SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 24期
关键词：
co-sputtering; nanocomposite thin films; TaN-Ag; C-AFM;
D O I：
10.1016/j.surfcoat.2007.04.033
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
TaN-Ag nanocomposite films were deposited by reactive co-sputtering on tool steel substrates. The films were then annealed using RTA (Rapid Thermal Annealing) at 350 degrees C for 2, 4, 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. C-AFM (Conductive Atomic force Microscopy) and FESEM (Field-Emission Scanning Electron Microscopy) were applied to examine the Ag nano-particles emerged on the surface of these thin films. A nano-indenter and a pin-on-disk tribometer were used to study the effect of annealing on the films' mechanical properties. The results reveal that annealing by RTA can cause Ag nano-particles to emerge on the TaN surface. Consequently, the mechanical properties of the films will vary depending on annealing conditions, Ag content, and Ag particle emergence. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：9565 / 9570
页数：6
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