Performance of microdischarge devices and arrays with screen electrodes

被引:16
作者
Park, SJ [1 ]
Wagner, CJ [1 ]
Eden, JG [1 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Lab Opt Phys & Engn, Urbana, IL 61801 USA
关键词
Anodes - Cathodes - Copper - Electric potential - Metal foil - Neon - Nickel - Permittivity - Plasmas - Polyamides;
D O I
10.1109/68.903221
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Cylindrical microdischarge devices, 50-150 mum in diameter and fabricated in Ni-polyimide-Cu or Ni foil structures, have been operated with Ni or Cu screens serving as the anode and/or cathode. As compared with annular anode (open bore) designs, the installation of at least one screen electrode has the effect of lowering the device operating voltage by as much as 30% while raising the electron temperature of the plasma. As a result, microdischarge devices 50 mum in diameter operate at voltages below 95 V at a Ne gas pressure of 700 torr, exhibit hollow cathode operation at gas pressures beyond 300 torr (or at least a factor of three higher than those observed previously), and the power output of a device with an anode screen operating at 300 torr is double that of its no-screen counterpart. Screen electrodes also stabilize the ignition characteristics of arrays and extend device lifetimes.
引用
收藏
页码:61 / 63
页数:3
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