III-V micromachined devices for microsystems

This paper aims to present a brief review on the specific features and advantages of the m-V micromachined devices for microsystems, making them an attractive alternative to the well developed Si-based microtechnology in the field of MEMS (Micro-Electro-Mechanical Systems). The GaAs-based MEMS processing techniques are more currently investigated for collective fabrication of low cost and high Volume microsystem devices. Potential. applications of M-based microtechnology are presented for monolithic integration of optoelectronic functions with micro-electro-mechanical transducers enabling the realisation of MOEMS (Micro-Opto-Electro-Mechanical Systems). (C) 1998 Elsevier Science Ltd. All rights reserved.