Near-unity below-band-gap absorption by microstructured silicon

被引:428
作者
Wu, C [1 ]
Crouch, CH
Zhao, L
Carey, JE
Younkin, R
Levinson, JA
Mazur, E
Farrell, RM
Gothoskar, P
Karger, A
机构
[1] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[3] Harvard Univ, Dept Chem, Cambridge, MA 02138 USA
[4] Radiat Monitoring Devices Inc, Watertown, MA 02472 USA
关键词
D O I
10.1063/1.1358846
中图分类号
O59 [应用物理学];
学科分类号
摘要
We increased the absorptance of light by silicon to approximately 90% from the near ultraviolet (0.25 mum) to the near infrared (2.5 mum) by surface microstructuring using laser-chemical etching. The remarkable absorptance most likely comes from a high density of impurities and structural defects in the silicon lattice, enhanced by surface texturing. Microstructured avalanche photodiodes show significant enhancement of below-band-gap photocurrent generation at 1.06 and 1.31 mum, indicating promise for use in infrared photodetectors. (C) 2001 American Institute of Physics.
引用
收藏
页码:1850 / 1852
页数:3
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