Laser direct-write of metal patterns for interconnects and antennas

被引:16
作者
Piqué, A [1 ]
Arnold, CB [1 ]
Pratap, B [1 ]
Auyeung, RCY [1 ]
Kim, HS [1 ]
Weir, DW [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
来源
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II | 2003年 / 4977卷
关键词
laser direct-write; laser micromachining; laser forward transfer; conformal antennas;
D O I
10.1117/12.479407
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The use of direct-write techniques in the design and manufacture of interconnects and antennas offers some unique advantages for the development of next generation commercial and defense microelectronic systems. Using a laser forward transfer technique, we have demonstrated the ability to:rapidly prototype interconnects and various antenna designs. This laser direct-write process is compatible with a broad class of materials such as metals and electronic ceramics and its capable of depositing patterns of any of these materials over non-planar surfaces in a conformal manner. The laser direct-write process is computer controlled so as to allow any given design to be easily modified and adapted to a particular application. To illustrate the potential of this technique, examples of metal lines on laser micromachined polyimide substrates for interconnect applications, are discussed and evaluated. In addition, examples of simple planar and conformal antennas are provided to demonstrate how this technique can influence current and future microelectronic device applications.
引用
收藏
页码:602 / 608
页数:7
相关论文
共 10 条
[1]  
[Anonymous], 2001, Direct-write technologies for rapid prototyping applications: sensors, electronics, and integrated power sources
[2]  
ARNOLD CB, 2003, IN PRESS J ELECTROCH
[3]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[4]   New approach to laser direct writing active and passive mesoscopic circuit elements [J].
Chrisey, DB ;
Pique, A ;
Fitz-Gerald, J ;
Auyeung, RCY ;
McGill, RA ;
Wu, HD ;
Duignan, M .
APPLIED SURFACE SCIENCE, 2000, 154 (154) :593-600
[5]  
NAGEL DJ, 2001, DIRECT WRITE TECHNOL, P557
[6]   Direct-write of sensor devices by a laser forward transfer technique [J].
Piqué, A ;
Weir, DW ;
Wu, PK ;
Pratap, B ;
Arnold, CB ;
Ringeisen, BR ;
McGill, RA ;
Auyeung, RCY ;
Kant, RA ;
Chrisey, DB .
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS, 2002, 4637 :361-368
[7]   Laser Direct Writing of circuit elements and sensors [J].
Piqué, A ;
Chrisey, DB ;
Auyeung, RCY ;
Lakeou, S ;
Chung, R ;
McGill, RA ;
Wu, PK ;
Duignan, M ;
Fitz-Gerald, J ;
Wu, HD .
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV, 1999, 3618 :330-339
[8]   A novel laser transfer process for direct writing of electronic and sensor materials [J].
Piqué, A ;
Chrisey, DB ;
Auyeung, RCY ;
Fitz-Gerald, J ;
Wu, HD ;
McGill, RA ;
Lakeou, S ;
Wu, PK ;
Nguyen, V ;
Duignan, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1) :S279-S284
[9]   Direct writing of electronic and sensor materials using a laser transfer technique [J].
Piqué, A ;
Chrisey, DB ;
Fitz-Gerald, JM ;
McGill, RA ;
Auyeung, RCY ;
Wu, HD ;
Lakeou, S ;
Nguyen, V ;
Chung, R ;
Duignan, M .
JOURNAL OF MATERIALS RESEARCH, 2000, 15 (09) :1872-1875
[10]  
PIQUE A, 2001, SPIE P, V4274, P317