Evaluation of top, angle, and side cleaned FIB samples for TEM analysis

被引：37

作者：

Montoya, Eduardo ^{[1
]}

Bals, Sara ^{[1
]}

Rossell, Marta D. ^{[1
]}

Schryvers, Dominique ^{[1
]}

van Tendeloo, Gustaaf ^{[1
]}

机构：

[1] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2007年 / 70卷 / 12期

关键词：

FIB; TEM sample preparation; sputter coating; LaAlO3/SrTiO3; HRTEM/HAADF-STEM; double cross sectional TEM;

D O I：

10.1002/jemt.20514

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

ITEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top-angle, side, and bottom-angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF-STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top-angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process.

引用

页码：1060 / 1071

页数：12

共 21 条

[1] Simulation of topography evolution and damage formation during TEM sample preparation using focused ion beams [J].