Theoretical calculations and performance results of a PZT thin film actuator

被引：18

作者：

Hoffmann, M

Küppers, H

Schneller, T

Böttger, U

Schnakenberg, U

Mokwa, W

Waser, R

机构：

[1] Rhein Westfal TH Aachen, Electroceram Mat Res Labs, D-52074 Aachen, Germany

[2] IFF Res Labs, Julich, Germany

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 10期

关键词：

D O I：

10.1109/TUFFC.2003.1244739

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 mum, the actuator was designed with a cantilever length of 300 mum to 1000 mum. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.

引用

页码：1240 / 1246

页数：7

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