Orientation-controlled growth of single-crystal silicon-nanowire arrays

被引:113
作者
Ge, SP
Jiang, KL [1 ]
Lu, XX
Chen, YF
Wang, RM
Fan, SS
机构
[1] Tsinghua Univ, Dept Phys, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Foxconn Nanotechnol Res Ctr, Beijing 100084, Peoples R China
[3] Peking Univ, Sch Phys, Electron Microscopy Lab, Beijing 100087, Peoples R China
[4] Peking Univ, Sch Phys, State Key Lab Mesoscop Phys, Beijing 100087, Peoples R China
关键词
D O I
10.1002/adma.200400474
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Silicon nanowire arrays on silicon substrates can be synthesized with precise orientation depending on the crystal orientation of the substrate using a vapor-liquid-solid epitaxial growth mechanism. The projections of the as-grown arrays form rectangular networks on silicon (100) substrates (see Figure), parallel straight lines on silicon (110) substrates, and triangular networks on silicon (111) substrates.
引用
收藏
页码:56 / +
页数:7
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