Influences of preparation conditions on laser-ablated Si nano-particle formation processes observed by imaging laser spectroscopy

被引:37
作者
Muramoto, J [1 ]
Nakata, Y [1 ]
Okada, T [1 ]
Maeda, M [1 ]
机构
[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka 81281, Japan
关键词
nano-particles; laser ablation; laser-induced fluorescence; Rayleigh scattering; clustering; imaging;
D O I
10.1016/S0169-4332(97)00658-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The behaviors of atomic species and nano-particles in the laser-ablated plume were investigated by two-dimensional laser-induced fluorescence (2D-LIF) and UV Rayleigh scattering (2D-RS) imaging techniques. The images observed in the ablation of silicon (Si) in a He ambient are presented for various processing conditions. The temporal behavior of Si(2) molecules, which were generated by the clustering of Si atoms, was also investigated. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:373 / 377
页数:5
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