Electrowetting-assisted drop deposition for controlled spotting

被引:14
作者
Leichle, T. [1 ]
Tanguy, L. [1 ]
Nicu, L. [1 ]
机构
[1] Univ Toulouse 2, CNRS, LAAS, F-31077 Toulouse, France
关键词
D O I
10.1063/1.2817748
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrowetting is used to assist the delivery of droplets by a contact method. The electroassisted liquid dispensing technique enables to monitor the drop size via the voltage applied between the tool, i.e., silicon cantilevers and the deposition surface. Voltages ranging from 0 to 210 V are used to deposit water-glycerol drops with diameters and volumes in the ranges of 5-40 mu m and 20 fL-14 pL. The presented results demonstrate that electrowetting-assisted deposition is of special interest for patterning applications requiring large features to be directly and quickly written using a minimum volume of reagents. (C) 2007 American Institute of Physics.
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页数:3
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