Discharge characteristics of an atmospheric pressure radio-frequency plasma jet

被引：37

作者：

Zhu, WC ^{[1
]}

Wang, BR

Yao, ZX

Pu, YK

机构：

[1] Tsing Hua Univ, Dept Engn Phys, Beijing 100084, Peoples R China

[2] Chem Def Inst, Beijing 102205, Peoples R China

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2005年 / 38卷 / 09期

关键词：

D O I：

10.1088/0022-3727/38/9/011

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An atmospheric pressure plasma jet using radio-frequency (rf) (13.56 MHz) power is developed to produce a homogeneous glow discharge at low temperatures (between 50 degrees C and 150 degrees C on the inner electrode). Discharge parameters (power, voltage, current and the phase angle) are measured and the influence of the operating parameters on the discharge characteristics is investigated for a He/O-2 gas mixture. By varying the input power, a 'phase saturation' region and the 'arc failure' mode are identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40 slpm in our experiment. At this ratio, a low power consumption and wide operational range for rf power (200W) are obtained.

引用

页码：1396 / 1401

页数：6

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