Transparent conducting properties of anatase Ti0.94Nb0.06O2 polycrystalline films on glass substrate

被引：33

作者：

Haosugi, T. ^{[1
,2
]}

Ueda, A. ^{[1
]}

Nakao, S. ^{[2
]}

Yamada, N. ^{[2
]}

Furubayashi, Y. ^{[2
]}

Hirose, Y. ^{[2
]}

Konuma, S. ^{[2
]}

Shimada, T. ^{[1
,2
]}

Hasegawa, T. ^{[1
,2
]}

机构：

[1] Univ Tokyo, Dept Chem, Tokyo 1130033, Japan

[2] Kanagawa Acad Sci & Technol, Kawasaki, Kanagawa 2130012, Japan

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 17期

关键词：

transparent conducting oxide; titanium dioxide; pulsed laser deposition; TiO2; Nb-doped; TNO;

D O I：

10.1016/j.tsf.2007.10.028

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on transparent conducting properties of anatase Ti0.94Nb0.06O2 (TNO) polycrystalline films on glass substrate, and discuss the role of grain crystallinity and grain boundary on resistivity. Thin films of TNO were deposited using pulsed laser deposition at substrate temperature ranging from room temperature to 350 degrees C, with subsequent H-2-annealing at 500 degrees C. Polycrystalline TNO films showed resistivity of 4.5 x 10(-4) Omega cm and 1.5 x 10(-3) Omega cm for films prepared at substrate temperature of room temperature and 250 degrees C, respectively. X-ray diffraction measurements and transmission electron microscopy reveal that grain crystallinity and grain boundary play key roles in conductive films. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：5750 / 5753

页数：4

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