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A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass

被引：69
作者：
Kim, JH
Na, KH
Kang, CJ
Kim, YS
机构：
[1] Myongji Univ, Dept Elect Engn, Yongin 449728, Kyunggi Do, South Korea
[2] Myongji Univ, Dept Phys, Yongin 449728, Kyunggi Do, South Korea
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 120卷 / 02期
关键词：
micropump; PDMS; ITO heater; diffuser; flow rate;
D O I：
10.1016/j.sna.2004.12.024
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A thermopneumatic-actuated polydimethylsiloxane (PDMS)-based micropump has been fabricated and its properties have been characterized. Diffusers are used as flow-rectifying elements instead of passive check valves. The advantages of the proposed micropump are the low cost fabrication process and the transparent properties of the PDMS and indium tin oxide (ITO)-coated glass. We present a PDMS micropump, that is easily integrated with in-channel PDMS microvalves on the same substrate. The flow rate of the micropump increases linearly with increasing applied pulse voltage to the ITO heater with resistance of 6.54 k Omega. The peak flow rate of 78 nl/min is observed at the duty ratio of 10% for the applied pulse voltage of 55 V at 6 Hz. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：365 / 369
页数：5
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