Torque evaluation of a LIGA fabricated electrostatic micromotor

被引：17

作者：

Samper, VD ^{[1
]}

Sangster, AJ

Reuben, RL

Wallrabe, U

机构：

[1] Inst Microelect, Singapore 117684, Singapore

[2] Heriot Watt Univ, Dept Elect & Comp Engn, Edinburgh EH14 4AS, Midlothian, Scotland

[3] FZK, Karlsruhe, Germany

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1999年 / 8卷 / 01期

关键词：

electrostatic; LIGA; micromotor; torque; wobble;

D O I：

10.1109/84.749410

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10(-7) Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. [308].

引用

页码：115 / 123

页数：9

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