A multigigabit DRAM technology with 6F2 open-bitline cell, distributed overdriven sensing, and stacked-flash fuse

被引:16
作者
Takahashi, T [1 ]
Sekiguchi, T
Takemura, R
Narui, S
Fujisawa, H
Miyatake, S
Morino, M
Arai, K
Yamada, S
Shukuri, S
Nakamura, M
Tadaki, Y
Kajigaya, K
Kimura, K
Itoh, K
机构
[1] Elpida Memory Inc, Kanagawa 2291197, Japan
[2] Hitachi Ltd, Tokyo, Japan
[3] Hitachi ULSI Syst Co Ltd, Tokyo, Japan
关键词
array noise; DRAM; low voltage and high speed; memory cell; post-packaging repair;
D O I
10.1109/4.962294
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A multigigabit DRAM technology was developed that features a low-noise 6F(2) open-bitline cell with fully utilized edge arrays, distributed overdriven sensing for operation below 1 V, and a highly reliable post-packaging repair scheme using a stacked-Flash fuse. This technology, which can be used to fabricate a 0.13-mum 180-mm(2) 1-Gb DRAM assembled in a 400-mil package, was verified using a 57.6-mm(2), 200-MHz array-cycle, 256-Mb test chip with 0.109-mum(2) cells.
引用
收藏
页码:1721 / 1727
页数:7
相关论文
共 13 条
[1]  
CHOI J, 2000, ISSCC, P392
[2]  
HASEGAWA M, 1998, ISSCC FEB, P80
[3]   A 16-MBIT DRAM WITH A RELAXED SENSE-AMPLIFIER-PITCH OPEN-BIT-LINE ARCHITECTURE [J].
INOUE, M ;
YAMADA, T ;
KOTANI, H ;
YAMAUCHI, H ;
FUJIWARA, A ;
MATSUSHIMA, J ;
AKAMATSU, H ;
FUKUMOTO, M ;
KUBOTA, M ;
NAKAO, I ;
AOI, N ;
FUSE, G ;
OGAWA, S ;
ODANAKA, S ;
UENO, A ;
YAMAMOTO, H .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1988, 23 (05) :1104-1112
[4]  
Kim JS, 1998, IEEE J SOLID-ST CIRC, V33, P1096
[5]   A 390-mm2, 16-bank, l-Gb DDR SDRAM with hybrid bitline architecture [J].
Kirihata, T ;
Mueller, G ;
Ji, B ;
Frankowsky, G ;
Ross, JM ;
Terletzki, H ;
Netis, DG ;
Weinfurtner, O ;
Hanson, DR ;
Daniel, G ;
Hsu, LLC ;
Storaska, DW ;
Reith, AM ;
Hug, MA ;
Guay, KP ;
Selz, M ;
Poechmueller, P ;
Hoenigschmid, H ;
Wordeman, MR .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1999, 34 (11) :1580-1588
[6]  
KIRIHATA T, 2001, IEEE INT SOL STAT CI, P382
[7]   A 5 V-ONLY 64K DYNAMIC RAM BASED ON HIGH S-N DESIGN [J].
MASUDA, H ;
HORI, R ;
KAMIGAKI, Y ;
ITOH, K ;
KAWAMOTO, H ;
KATTO, H .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (05) :846-854
[8]   A 29-ns 64-Mb DRAM with hierarchical array architecture [J].
Nakamura, M ;
Takahashi, T ;
Akiba, T ;
Kitsukawa, G ;
Morino, M ;
Sekiguchi, T ;
Asano, I ;
Komatsuzaki, K ;
Tadaki, Y ;
Cho, S ;
Kajigaya, K ;
Tachibana, T ;
Sato, K .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1996, 31 (09) :1302-1307
[9]   A 0.135 μm2 6F2 trench-sidewall vertical device cell for 4Gb/16Gb DRAM [J].
Radens, CJ ;
Gruening, U ;
Mandelman, JA ;
Seitz, M ;
Dyer, T ;
Lea, D ;
Casarotto, D ;
Clevenger, L ;
Nesbit, L ;
Malik, R ;
Halle, S ;
Kudelka, S ;
Tews, H ;
Divakaruni, R ;
Sim, J ;
Strong, A ;
Tibbel, D ;
Arnold, N ;
Bukofsky, S ;
Preuninger, J ;
Kunkel, G ;
Bronner, G .
2000 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, 2000, :80-81
[10]  
Restle P. J., 1992, International Electron Devices Meeting 1992. Technical Digest (Cat. No.92CH3211-0), P807, DOI 10.1109/IEDM.1992.307481