Electrical properties of a new polymer/photoresist composite

被引:3
作者
Bruschi, P
Nannini, A
机构
[1] Dipto. Ingegneria dell'I., Univ. degli Studi di Pisa, 156126 Pisa
关键词
D O I
10.1063/1.363056
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new technique for growing thin films of conducting polymer with arbitrary geometry on substrates compatible with the microelectronic technologies is proposed. The new procedure utilizes commercial photoresist patterns properly modified in a way to make them suitable for the oxidation of a large class of monomers. The technique was tested with pyrrole, obtaining thin films of a composite material (resist/polypyrrole) with high conductivity. The new material was optically, morphologically, and electrically characterized. Four probe resistors and Wheatstone microbridges were built in order to measure the resistance as a function of temperature and the resistance fluctuation spectral density, respectively. Analysis of the results on the basis of conduction models of disordered media is presented. The time stability of the electrical parameters was also investigated. (C) 1996 American Institute of Physics.
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页码:2279 / 2284
页数:6
相关论文
共 24 条
[1]   CRITICAL-BEHAVIOR OF THE ELECTRICAL-RESISTANCE AND ITS NOISE IN INVERTED RANDOM-VOID SYSTEMS [J].
BALBERG, I ;
WAGNER, N ;
HEARN, DW ;
VENTURA, JA .
PHYSICAL REVIEW LETTERS, 1988, 60 (19) :1887-1890
[2]   LIGHT-INDUCED CONVERSION OF CHLORINE CONTAINING POLYMERS IN THE PRESENCE OF PYRROLE INTO CONDUCTING PATTERNS [J].
BAUMANN, R ;
LENNARZ, K ;
BARGON, J .
SYNTHETIC METALS, 1993, 54 (1-3) :243-249
[3]   POLYMERIZATION OF PYRROLE BY LASER-INDUCED PHOTOLYSIS OF ONIUM SALTS [J].
BEHNCK, W ;
BARGON, J .
SYNTHETIC METALS, 1993, 54 (1-3) :223-228
[4]   VAPOR AND GAS-SENSING BY NOISE MEASUREMENTS ON POLYMERIC BALANCED BRIDGE MICROSTRUCTURES [J].
BRUSCHI, P ;
NANNINI, A ;
NERI, B .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :429-432
[5]   LOW-FREQUENCY RESISTANCE FLUCTUATION MEASUREMENTS ON CONDUCTING POLYMER THIN-FILM RESISTORS [J].
BRUSCHI, P ;
CACIALLI, F ;
NANNINI, A ;
NERI, B .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (06) :3640-3644
[6]   SENSING PROPERTIES OF POLYPYRROLE POLYTETRAFLUOROETHYLENE COMPOSITE THIN-FILMS FROM GRANULAR METAL POLYMER PRECURSORS [J].
BRUSCHI, P ;
CACIALLI, F ;
NANNINI, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1992, 32 (1-3) :313-317
[7]  
BRUSCHI P, 1994, SENSOR ACTUAT B-CHEM, V18, P421
[8]  
BRUSCHI P, UNPUB
[9]  
Davis E. A., 1979, ELECT PROCESSES NONC
[10]   LOW-FREQUENCY FLUCTUATIONS IN SOLIDS - 1-F NOISE [J].
DUTTA, P ;
HORN, PM .
REVIEWS OF MODERN PHYSICS, 1981, 53 (03) :497-516