The ripples and nanoparticles on silicon irradiated by femtosecond laser

被引:34
作者
Han, Yanhua [1 ]
Qu, Shiliang [1 ]
机构
[1] Harbin Inst Technol, Dept Optoelect Sci, Weihai 264209, Peoples R China
关键词
NANOSECOND; BREAKDOWN; ABLATION; DYNAMICS; PLASMA;
D O I
10.1016/j.cplett.2010.06.071
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The surface configuration evolvement of silicon with the increasing pulse number irradiated by femtosecond laser has been studied. The ripples and nanoparticles are formed in the irradiated region. The period of the ripples decreases with the increasing pulse number, while the diameter of the visible structured region increases with the increasing pulse number. The interference of laser with surface plasmons is proposed to explain the formation of the ripple. The decreasing of the spatial period for surface ripples is due to the decrease of the surface plasmon wavelength with the decreasing electron number density in the plasma. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:241 / 244
页数:4
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