共 21 条
[2]
FABRICATION OF MICROMECHANICAL DEVICES FROM POLYSILICON FILMS WITH SMOOTH SURFACES
[J].
SENSORS AND ACTUATORS,
1989, 20 (1-2)
:117-122
[3]
Hendriks M., 1983, Solid State Chemistry 1982. Proceedings of the Second European Conference, P193
[5]
Hu SM, 1991, J APPL PHYS, V70, P53
[6]
KAMINS T, 1988, POLYCRYSTALLINE SILI
[8]
KRULEVITCH P, 1992, MATER RES SOC SYMP P, V276, P79, DOI 10.1557/PROC-276-79
[9]
KRULEVITCH P, 1991, TRANSDUCERS 91, P949