Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

被引：79

作者：

Boero, G ^{[1
]}

Utke, I ^{[1
]}

Bret, T ^{[1
]}

Quack, N ^{[1
]}

Todorova, M ^{[1
]}

Mouaziz, S ^{[1
]}

Kejik, P ^{[1
]}

Brugger, J ^{[1
]}

Popovic, RS ^{[1
]}

Hoffmann, P ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 04期

关键词：

D O I：

10.1063/1.1856134

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about 1 V/AT, a resistance of a few kilo-ohms, and can be biased with a maximum current of about 1 mA. The room-temperature magnetic field resolution is about 10 muT/Hz(1/2) at frequencies above 1 kHz. (C) 2005 American Institute of Physics.

引用

页码：042503 / 1

页数：3

共 35 条

[1] [Anonymous], 1985, SCANNING ELECT MICRO
[2] Giant planar Hall effect in colossal magnetoresistive La0.84Sr0.16MnO3 thin films
Bason, Y
Klein, L
Yau, JB
Hong, X
Ahn, CH
[J]. APPLIED PHYSICS LETTERS, 2004, 84 (14) : 2593 - 2595
[3] Local magnetic probes of superconductors
Bending, SJ
[J]. ADVANCES IN PHYSICS, 1999, 48 (04) : 449 - 535
[4] BERGER L, 1980, HALL EFFECTS ITS APP
[5] Micro-Hall devices: performance, technologies and applications
Boero, G
Demierre, M
Besse, PA
Popovic, RS
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2003, 106 (1-3) : 314 - 320
[6] Scanning nanoscale multiprobes for conductivity measurements
Boggild, P
Hansen, TM
Kuhn, O
Grey, F
Junno, T
Montelius, L
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (07) : 2781 - 2783
[7] Integrated piezoresistive sensors for atomic force-guided scanning Hall probe microscopy
Brook, AJ
Bending, SJ
Pinto, J
Oral, A
Ritchie, D
Beere, H
Henini, M
Springthorpe, A
[J]. APPLIED PHYSICS LETTERS, 2003, 82 (20) : 3538 - 3540
[8] Planar Hall effect sensor for magnetic micro- and nanobead detection
Ejsing, L
Hansen, MF
Menon, AK
Ferreira, HA
Graham, DL
Freitas, PP
[J]. APPLIED PHYSICS LETTERS, 2004, 84 (23) : 4729 - 4731
[9] Advances in magnetic microscopy
Freeman, MR
Choi, BC
[J]. SCIENCE, 2001, 294 (5546) : 1484 - 1488
[10] Extraordinary Hall effect in magnetic films
Gerber, A
Milner, A
Karpovsky, M
Lemke, B
Habermeier, HU
Tuaillon-Combes, J
Négrier, M
Boisron, O
Mélinon, P
Perez, A
[J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 242 : 90 - 97

← 1 2 3 4 →