Combined scanning tunneling and force microscope with fuzzy controlled feedback

被引：4

作者：

Battiston, FM

Bammerlin, M

Loppacher, C

Guggisberg, M

Luthi, R

Meyer, E

Eggimann, F

Guntherodt, HJ

机构：

[1] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland

[2] Swiss Fed Inst Technol, Dept Elect Engn, CH-8092 Zurich, Switzerland

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / Suppl 1期

关键词：

D O I：

10.1007/s003390051098

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Decision-making logic based on fuzzy logic and an adaptive PI-controller was inserted into the feedback loop of a combined atomic force microscope/scanning tunneling microscope (AFM/STM), which is able to measure the frequency shift Delta f of the cantilever-type spring and the mean tunneling current (I) over bar(t) simultanously. Depending on the conductivity of the surface the fuzzy logic controller decides whether it has to use the AFM feedback or the STM feedback. On conductive regions of the sample STM mode is used, whereas on poorly conducting regions the non-contact AFM mode is preferred. This allows one to scan over heterogenous surfaces avoiding a tip crash.

引用

页码：S49 / S53

页数：5

共 17 条

[1]

BAMMERLIN M, 1997, PROBE MICROSCOPY, V1, P3

[2] ATOMIC FORCE MICROSCOPE [J].