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Direct bonding between quaternary compound semiconductor and garnet crystals for integrated optical isolator

被引：8
作者：
Yokoi, H
Mizumoto, T
Shimizu, M
Futakuchi, N
Kaida, N
Nakano, Y
机构：
[1] Tokyo Inst Technol, Fac Engn, Dept Phys Elect, Meguro Ku, Tokyo 1528552, Japan
[2] Univ Tokyo, Sch Engn, Dept Elect Engn, Bunkyo Ku, Tokyo 1138654, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 1A期
关键词：
optical isolator; wafer direct bonding; semiconductor; magnetic garnets; SEM;
D O I：
10.1143/JJAP.38.195
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An integrated optical isolator employing a nonreciprocal phase shift is very attractive because it does not need phase matching. We have investigated a novel configuration of the integrated optical isolator, employing the nonreciprocal phase shift, in which the magnetooptic waveguide has a magnetic garnet/GaInAsP/InP structure. The wafer direct bonding technique is necessary to realize this structure. The direct bonding between quaternary III-V compound semiconductors and garnet crystals was experimentally Studied. The bonding was achieved by chemical treatment and subsequent heat treatment at temperatures ranging from 110 to 330 degrees C. Cross-sectional scanning electron microscope (SEM) images indicated that there were no gaps between the two wafers in contact.
引用
收藏
页码：195 / 197
页数：3
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