Thickness distribution in pulsed laser deposited PZT films

被引：13

作者：

Tyunina, M ^{[1
]}

Wittborn, J

Bjormander, C

Rao, KV

机构：

[1] Royal Inst Technol, Dept Condensed Matter Phys, S-10044 Stockholm, Sweden

[2] Latvian State Univ, Inst Solid State Phys, LV-1063 Riga, Latvia

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 04期

关键词：

D O I：

10.1116/1.581356

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The two-dimensional spatial distribution of the thickness of pulsed laser deposited lead zirconate titanate films has been studied experimentally as a function of the laser characteristics and ambient oxygen pressure. The profiles obtained in vacuum are in agreement with a model of adiabatic expansion of the plume with an adiabatic index of the vapor gamma = 5/3 and initial height of the plume 10(-2) mm. An increase in the growth rate and nonmonotonic "broadening" of the profiles of the films found with increasing oxygen pressure is shown to correlate well with the change in the sorption kinetics on the substrate surface. (C) 1998 American Vacuum Society. [S0734-2101(98)10604-8].

引用

页码：2381 / 2384

页数：4

共 17 条

[1] LASER-ABLATION OF PB(TI0.48ZR0.52)O-3 TARGET - CHARACTERIZATION AND EVOLUTION OF CHARGED SPECIES [J].