Macrotexture and growth chemistry in ultrananocrystalline diamond thin films

被引:24
作者
Gerbi, JE
Birrell, J
Sardela, M
Carlisle, JA
机构
[1] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[2] Univ Illinois, Freder Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Argonne Natl Lab, Ctr Nanoscale Mat, Argonne, IL 60439 USA
关键词
nanocrystalline diamond; diamond; UNCD; XRD; preferred orientation; CVD;
D O I
10.1016/j.tsf.2004.06.155
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have determined the average preferred crystalline orientation of thin ultrananocrystalline diamond (UNCD) films using X-ray diffraction. The grain size and lattice parameters of the films were also calculated. We show how these characteristics change markedly with the gas chemistry used during growth, adding either 0-20% nitrogen or 0-15% hydrogen to the argon-rich, argon and methane microwave plasma used. We discuss how these changes give evidence that there is a competing growth mechanism between C-2 dimer mediated growth and the more widely used methyl radical growth process. Finally, we identify an additional X-ray diffraction peak, dependent on both the substrate used and growth conditions, as silicon carbide. We discuss these results in the context of the growth mechanisms of ultrananocrystalline diamond. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:41 / 48
页数:8
相关论文
共 34 条
[1]   Materials science and fabrication processes for a new MEMS technoloey based on ultrananocrystalline diamond thin films [J].
Auciello, O ;
Birrell, J ;
Carlisle, JA ;
Gerbi, JE ;
Xiao, XC ;
Peng, B ;
Espinosa, HD .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (16) :R539-R552
[2]   INSITU CHARACTERIZATION OF DIAMOND NUCLEATION AND GROWTH [J].
BELTON, DN ;
HARRIS, SJ ;
SCHMIEG, SJ ;
WEINER, AM ;
PERRY, TA .
APPLIED PHYSICS LETTERS, 1989, 54 (05) :416-418
[3]   Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films [J].
Bhattacharyya, S ;
Auciello, O ;
Birrell, J ;
Carlisle, JA ;
Curtiss, LA ;
Goyette, AN ;
Gruen, DM ;
Krauss, AR ;
Schlueter, J ;
Sumant, A ;
Zapol, P .
APPLIED PHYSICS LETTERS, 2001, 79 (10) :1441-1443
[4]   Bonding structure in nitrogen doped ultrananocrystalline diamond [J].
Birrell, J ;
Gerbi, JE ;
Auciello, O ;
Gibson, JM ;
Gruen, DM ;
Carlisle, JA .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) :5606-5612
[5]   Morphology and electronic structure in nitrogen-doped ultrananocrystalline diamond [J].
Birrell, J ;
Carlisle, JA ;
Auciello, O ;
Gruen, DM ;
Gibson, JM .
APPLIED PHYSICS LETTERS, 2002, 81 (12) :2235-2237
[6]  
BIRRELL J, 2004, IN PRESS DIAM RELAT
[7]  
CARLISLE JA, 2003, INTERFACE, V12, P38
[8]  
COELHO AA, XFIT SOFTWARE PROGRA
[9]  
ESPINOSA HD, 2003, MRS P, V741, pJ2
[10]  
ESPINOSA HD, 2003, EXP MECH, V43, P257