共 13 条
[2]
CARLSON DE, 1984, SEMICONDUCT SEMIMET, V21, P7
[5]
MICROSTRUCTURE AND ETCHING PROPERTIES OF SPUTTERED INDIUM TIN OXIDE (ITO)
[J].
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,
1991, 123 (02)
:461-472
[6]
INOUE A, 1989, 4TH P INT TOP M NUCL, V1, P274
[9]
MORHI M, 1990, JPN J APPL PHYS PT 2, V29, pL1932