HEAT-TREATMENT IN HYDROGEN GAS AND PLASMA FOR TRANSPARENT CONDUCTING OXIDE-FILMS SUCH AS ZNO, SNO2 AND INDIUM TIN OXIDE

被引：91

作者：

MINAMI, T

SATO, H

NANTO, H

TAKATA, S

机构：

来源：

THIN SOLID FILMS | 1989年 / 176卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90100-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：277 / 282

页数：6

相关论文

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[6] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
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[7] HYDROGEN PLASMA INTERACTIONS WITH TIN OXIDE SURFACES
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[10] THE ORGANO-METALLIC CHEMICAL VAPOR-DEPOSITION OF ZNS AND ZNSE AT ATMOSPHERIC-PRESSURE
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